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Development of a Compact Resonance Ionization Mass Spectrometer for Trace Element Analysis of Potassium

机译:一种紧凑型谐振电离质谱仪的研制   钾的微量元素分析

摘要

A compact resonance ionization mass spectrometer is developed using two laserdiodes and a quadrupole mass spectrometer to perform trace element analysis ofpotassium. With the help of a narrow linewidth of the laser diode, the isotopeshifts of $^{40}{\rm K}$ and $^{41}{\rm K}$ of the 405 nm line with respect to$^{39}{\rm K}$, corresponding to the transition of $4\,^2$S$_{1/2}\rightarrow$$5\,^2$P$^\circ_{1/2}$, are measured to be $207\pm13$ MHz and $451\pm10$ MHz,respectively, by comparing them to the known hyperfine splitting widths of the$4\,^2{\rm S}_{1/2}$ ground state of each potassium isotope. The overalldetection efficiency of an order of $\sim10^{-6}$ in our setup indicates theavailability of RIMS to the analysis of the trace metal impurities on or in acertain material such as the contamination assessment of semiconductor wafers.
机译:利用两个激光二极管和一个四极质谱仪开发了一种紧凑的共振电离质谱仪,用于钾的痕量元素分析。借助窄的激光二极管线宽,405 nm线的$ ^ {40} {\ rm K} $和$ ^ {41} {\ rm K} $相对于$ ^ {39的同位素位移} {\ rm K} $,对应于过渡$ 4 \,^ 2 $ S $ _ {1/2} \ rightarrow $$ 5 \,^ 2 $ P $ ^ \ circ_ {1/2} $分别将它们与每个钾同位素的$ 4 \,^ 2 {\ rm S} _ {1/2} $基态的已知超细分裂宽度进行比较,分别为$ 207 \ pm13 $ MHz和$ 451 \ pm10 $ MHz 。在我们的设置中,总检测效率约为\\ sim10 ^ {-6} $,表明RIMS可用于分析某些材料上或其中的痕量金属杂质,例如半导体晶圆的污染评估。

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